中国空间科学技术 ›› 2021, Vol. 41 ›› Issue (2): 10-18.doi: 10.16708/j.cnki.1000-758X.2021.0017

• 研究探讨 • 上一篇    下一篇

溅射靶对离子推力器的热辐射影响研究

耿海,孙明明,罗俊华,刘家涛   

  1. 兰州空间技术物理研究所真空技术与物理重点试验室兰州730000
  • 出版日期:2021-04-25 发布日期:2021-04-07

Study on the thermal radiation influence of the sputtering target on the ion thruster

GENG Hai,SUN Mingming, LUO Junhua, LIU Jiatao   

  1. Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China
  • Published:2021-04-25 Online:2021-04-07

摘要: 为了研究真空环境设备内溅射靶温度升高后对30cm离子推力器的热辐射影响,采用有限元分析的方法,首先对真空舱内的离子推力器羽流分布进行了模拟,在获得羽流对溅射靶造成的温度变化后,进一步分析了溅射靶温度升高对离子推力器温度以及栅极热形变位移所造成的影响。仿真结果显示,推力器羽流可采用定向分子流模型进行描述,羽流在真空舱内的扩散过程中几乎没有能量损失;30cm离子推力器工作时真空舱内大部分区域的气体压强在2×10-3~6×10-3 Pa;在溅射靶影响下,推力器加速栅和屏栅中心温度分别为352℃和440℃,边缘温度分别为342℃和411℃,屏栅和加速栅的间距缩小量由无溅射靶影响时的0.560mm增加到0.585mm;试验结果显示,加速栅和屏栅边缘温度分别为364℃和385℃,与仿真结果的比对误差均为6%,溅射靶后部羽流气体的温度测试值高于计算值约50℃,误差主要由于模拟中忽略了羽流粒子的能量沉积效应。

关键词: 离子推力器, 中性羽流, 溅射靶, 热辐射, 栅极热态间距, 电推进

Abstract: In order to study the thermal radiation influence of the sputtering target on the ion thruster in vacuum facility, finite element analysis was adopted to simulate the plume distribution of the thruster in vacuum chamber. Having obtained the temperature variation of the sputtering target caused by the influence of plume on the target, variation of temperature and thermal deformation of the grids caused by the increase of the sputtering target temperature were analyzed. The results show that the thruster plume can be described by a directional molecular flow model, and there was almost no energy loss in the plume diffusion process. The gas pressure in most areas of the vacuum chamber was in the range of 2×10-3 Pa to 6×10-3 Pa when the thruster was working. Under the influence of the sputtering target, the central temperatures of the accelerator grid and the screen grid were 352℃ and 440℃, and the edge temperatures were 342℃ and 411℃, respectively. The reduction of the gap between the screen grid and the accelerator grid increased from 0.560mm (without the sputtering target) to 0.585mm. The experimental results show that the temperatures at the edges of the accelerator grid and the screen grid were 364℃ and 385℃ respectively, with an error of 6% compared with the test results. The temperature test value of the plume at the rear of the sputtering target was about 50℃ higher than that in the simulation results, and the error was due to the neglection of the energy deposition of plume particles in simulation.

Key words: ion thruster, neutral plume, sputtering target, thermal radiation, the grids hot gap, electric propulsion