中国空间科学技术

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高分辨率相机采用集成微反射镜器件校正像差

傅丹鹰,乌崇德,殷纯永   

  1. 北京空间机电研究所,清华大学
  • 发布日期:1998-12-25

AN APPROACH FOR ACTIVE ABERRATION CORRECTION BY USING INTEGRATED MICROMIRROR DEVICE

Fu Danying Wu Chongde (Beijing Institute of Space Machine and Electricity,Beijing 100076) Yin Chunyong (Tsinghua University,Beijing 100084)   

  • Published:1998-12-25

摘要： 对已报道的各种集成微反射镜器件进行综述，对其特点和性能进行比较和评价；提出了采用ＭＥＭＳ工艺制造的微反射镜阵列器件作为能动器件，在星载空间高分辨率可见光相机中进行像差校正的想法，并给出对光学波前误差实时校正的具体方法。

关键词: 集成光学器件, 反射镜, 像差, 校正, 方法

Abstract: In this paper,a new approach for active aberration correction on spaceborne high resolution camera,by using integrated micromirror device fabricated in MEMS processes,is proposed.Summarization and analysis in general about the features and characteristics of various modern developed micromirror devices in the world are presented.