中国空间科学技术

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多种示漏气体分析仪的研制

闫荣鑫,肖祥正,陈光锋,张家珠   

  1. 北京卫星制造厂,兰州物理研究所
  • 发布日期:1998-12-25

DESIGN OF A MULTI SEARCH GASES LEAK DETECTOR

Yan Rongxin (Beijing Spacecraft,Beijing 100080) Xiao Xiangzheng Chen Guangfeng Zhang Jiazhu (Lanzhou Institute of Physics,Lanzhou 730000)   

  • Published:1998-12-25

摘要： 借鉴欧洲空间中心所用检漏仪的原理及主要技术措施，采用分子泵和机械泵的真空获得系统、钛升华泵和旁通阀真空维持系统、高灵敏的质谱分析系统，研制出了一次能检测出多个系统的高灵敏的多种示漏气体分析仪。文章介绍该分析仪的原理、设计方案、设计特点、设计计算。进行了性能测试，结果表明：该分析仪在大气环境条件下，最小可检测Ｈｅ，ＣＦ４的浓度小于５×１０－８，对Ｎｅ小于５×１０－７。

关键词: 气体, 漏泄, 气体分析仪, 设计, 性能试验

Abstract: The technical measures and the main principle of the European Space Agency leak detector are used for reference.The high vacuum system of mechanical pump and molecular pump is used to get high vacuum.The titanium sublimation pump is designed to hold high vacuum.The high sensitive quadrupole mass spectrometer analyzes the multi search inert gases.The leak detector principle,design character and design calculation are introduced in the paper.The many experiments show that the leak detection limit under the air environment for CF 4 and He is 5×10 -8 ,while the limit for Ne is 5×10 -7 .