中国空间科学技术

中国空间科学技术

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扫描辐射计内光路反射镜中SiO_2/Ag薄膜系统的失效分析

杨得全,范垂祯   

  1. 兰州物理研究所 ,兰州物理研究所
  • 发布日期:1992-06-25

FAILURE ANALYSIS OF SiO_2/Ag MIRROR SYSTEM IN THE SCANNING RADIOMETER

Yang Dequan Fan Chuizhen (Lanzhou Institute of Physics,CAST)   

  • Online:1992-06-25

摘要： SiO_2/Ag薄膜系统是扫描辐射计内光路反射镜的主要组成部分。采用高分辨扫描俄歇微探针(SAM)和扫描电镜分析对SiO_2/Ag 薄膜系统失效进行了较为全面的分析研究。通过扫描电镜观察发现,失效的反射镜表面SiO_2薄膜上存在大量析出物,借助于SAM分析,表明这些析出物主要是银和铜,析出物表面伴随有硫化和氧化。SAM的深度剖面结果说明,有析出物存在的区域,各薄膜层中存在原子间的扩散。文章就反射镜中Ag、Cu、和O的扩散和穿透行为进行了讨论,认为SiO_2薄膜致密度较差是导致反射镜失效的主要原因之一。

关键词: 薄膜, 辐射计, 镜, 失效分析

Abstract: SiO_2/Ag thin films system is an important part of mirror inscanning radiometer.Failure analysis of the mirror have been performed byhigh resolution Scanning Auger Microprobe (SAM) and Scanning ElectronMicroscope (SEM).Results of SEM Showed that there is a lot of segrega-tion on surface of the failed mirror.We have found that these segregationare mainly Ag and Cu as well as a few of oxides and sulfides by SAM.Auger depth profiles results indicated that atomic diffusion have been occ-urred among SiO_2/Ag/Cu thin films.The diffusion characteristic of atomicAg,Cu and O are discussed.It is suggested that a bad density of SiO_2 thinfilm may be a possible cause of mirror failure.

Key words: Thin film, Radiometer, Mirror, Failure analysis