中国空间科学技术

中国空间科学技术

• •    

非真空收集器质谱检漏标定技术

闫治平,黄淑英   

  1. 北京卫星制造厂!北京100080,北京卫星制造厂!北京100080
  • 发布日期:2001-06-25

A Calibration Study of Leakage Detecting With Mass-spectrometry Under Non-vacuum Environment

Yan Zhiping Huang Shuying (Beijing Spacecraft,Beijing 100080)   

  • Online:2001-06-25

被引次数

3

摘要： 从理论上导出了非真空收集器质谱检漏漏率的几种标定公式 ,并对漏率标定的各种方法进行了利弊分析。经综合考虑认为 :为实现快速的高精度的漏率标定 ,采用标准气量直接加注法进行漏率的标定是比较适宜的

关键词: 质谱仪, 检漏, 校准, 分析

Abstract: The calibration formulas of leakage detecting with mass spectrometry under nonvacuum environment are derived.The strengths and weaknesses of various existing leakage calibration method are analyed respectively.The analysis results show that in order to fast perform leakage calibration of high accuracy,the injection method of standard gas quantity is agreeable to leakage calibration.