中国空间科学技术

中国空间科学技术

• •    

恒压式气体微流量计的测量误差分析

孟扬   

  1. 兰州物理研究所
  • 发布日期:1999-02-25

Error Analysis of Measurement of Constant Pressure Flowmeter

Meng Yang (Lanzhou Institute of Physics,Lanzhou 730000)   

  • Online:1999-02-25

摘要： 恒压式气体微流量计（ＣＰＦＭ）被多个国家级实验室选作为计量学设备，用来校准真空规和真空漏孔。该文从理论上对ＣＰＦＭ和带参考室的ＣＰＦＭ的流量测量误差进行了分析。测量过程中温度波动和压力波动对ＣＰＦＭ的流量测量误差作用较大。为ＣＰＦＭ增加一个适当的参考室，可以减小测量过程中变容室温度变化对ＣＰＦＭ的流量测量误差的贡献。

关键词: 流量计, 测量误差, 分析

Abstract: The constant pressure flowmeters (CPFMs) were used to calibrate vacuum leaks and vacuum gauges in some national laboratories.The errors of measurement of CPFM and CPFM with a reference chamber were theoretically analyzed in the paper.The variation of temperature and pressure in the measurement process is one of the main parts of measurement errors.With the aid of a reference chamber,the error of measurement contributed by the variation of temperature in the variable chamber can be reduced.