中国空间科学技术

中国空间科学技术

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VO_2 热致变色薄膜的结构与光电性能研究

崔敬忠,达道安,姜万顺   

  1. 兰州物理研究所
  • 发布日期:1998-04-25

STUDY OF STRUCTURAL,OPTICAL AND ELECTRICAL PROPERTIES OF VO 2 THERMOCHROMATIC FILMS

Cui Jingzhong Da Daoan Jiang Wanshun (Lanzhou Institute of Physics,Lanzhou 730000)   

  • Online:1998-04-25

被引次数

10

摘要： 研究了用磁控溅射制备的ＶＯ２热致变色薄膜；用Ｘ射线衍射，Ｘ射线光电子谱和原子力显微镜对薄膜的结构进行了分析；对薄膜的光学和电学特性也进行了研究。

关键词: 热变色材料, 薄膜, 性能, 研究

Abstract: VO 2 thermochromic films were prepared by reactive magnetron sputtering method.The macro and micro structures of the samples were characterized by XRD,XPS and AFM methods.The effects of sputtering parameters on the optical/electrical properties of VO 2 films were studied.The transitional properties of VO 2 films were characterized by the electrical resistance change in the phase transition process.