中国空间科学技术

中国空间科学技术

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非真空收集器质谱检漏技术

阎治平,黄淑英   

  1. 北京卫星制造厂
  • 发布日期:1997-10-25

A STUDY OF LEAKAGE DETECTING WITH MASS SPECTROMETRY UNDER NON VACUUM ENVIRONMENT

Yan Zhiping Huang Shuying (Beijing Spacecraft,Beijing 100080)   

  • Online:1997-10-25

被引次数

12

摘要： 叙述了一种经济实用的被检件在非真空收集器中的质谱检漏方法，通过试验验证了方法的正确性，并从理论上分析了漏率的标定方法、检漏灵敏度以及检测误差。

关键词: 容器, 非真空检漏, 质谱分析, 校准

Abstract: An economical and practical leak detecting method of mass spectrometry with a part checked in non vacuum container is described.Experiments showed this method is correct.The sensitivity,detecting error and the calibrated leak rate were analysed theoretically.