中国空间科学技术

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在大面积柔性基底上制备空间应用薄膜研究

卢榆孙,冯煜东,李华   

  1. 兰州物理研究所!兰州730000,兰州物理研究所!兰州730000,兰州物理研究所!兰州730000
  • 发布日期:1996-10-25

STUDY OF PREPARING FILMS ON LARGE AREA FLEXIBLE SUBSTRATE FOR SPACE APPLICATION

Lu Yusun Feng Yudong Li Hua (Lanzhou Institute of Physics, Lanzhou 730000)   

  • Online:1996-10-25

摘要: 简明讨论了在大面积柔性高聚合物基底材料上制备空间应用薄膜的特点与要求,并对研制的大面积自动连续镀膜设备的结构与性能作了简介;比较深入地探讨了大面积柔性基底材料连续镀膜中对磁控靶和等离子体辉光放电场的要求与作用;介绍了柔性导电型第二表面镜的研制技术、性能与评价方法及结果。

关键词: 薄膜, 有机聚合物, 柔性体, 空间环境, 研究

Abstract: In this paper, report the characteristic and requirement of preparing large area films on the flexible polymer for the space application, the structure and performance of the facility developed for the large area continuously coating. The requirement and effects of magnetron and plasma deposition electric field in continuously coating on large area flexible substrate are discussed deeply, and the preparation technique, properties, evaluation method and results of flexible conductive SSM (Second Surface Mirror) are also described.