中国空间科学技术

中国空间科学技术

• •    

气体微流量标准装置的测控系统和实验研究

孟扬   

  1. 兰州物理研究所
  • 发布日期:1995-04-25

MEASUREMENT AND CONTROL SYSTEM AND EXPERAMENT STUDIES OF GAS FLOW STANDARD APPARATUS

Meng Yang(Lanzhou institute of Physics,Lanzhou 730000)   

  • Online:1995-04-25

被引次数

2

摘要： 气体微流量标准装置的测控系统在计算机控制下，采用电容薄膜规、光栅尺、铂电阻温度计等高精度传感器测出变容室内气体的压力、体积变化、温度等参量；并在流量测量的动态过程中将变客室内气体的压力波动控制在±０．０１％之内；工作软件实现了对气体微流量标准装置的计算机自动化控制和管理。气体激流量标准装置可以标准１７．１～１．２２×１０－５ＰａＬ／ｓ范围内的气体流量，校准不确定度小于１．９３％；目前它已用于标准漏孔的标定和实用型气体流量计的校准工作中。

关键词: 气体, 流量测量, 校准装置, 设计, 应用

Abstract: In measurement and control system of Gas Flow Standard Apparatus(GFSA),the pressure,volume change and temperature of gas in variable chamber are measured by capacitance diaphragm gauges,grating meters and platinum resistance thermometer.The fluctuation of pressure in variable chamber is controlled within±0.01% by a computer when gas flow is measured. Automatic control and management of GFSA are realized by software.The gas flow in the range of(17.1～1.22)×10-5PaL/s can be measured by GFSA, uncertainty is about 1.93%. Now,reference leaks and gas flowmeters have been calibrated by GFSA.