Abstract: A sol gel method is described for preparing high quality vanadium dioxide thin films which exhibit an abrupt resistivity change of 2~3 order of magnitude at about 60℃~80℃ on non crystal substrate.The method consists of four processes:quenching, coating ,drying and vacuum heat treatment.These processes show strong effects on the properties of the final film.The effects of the drying process on the film blistering and the effects of film thickness,quenching temperature,and heat treatment time on the resistivity switching property are studied.XRD (x ray diffraction), XPS (x ray photoelectron spectroscopy) are utilized to study the drying process,structure and characterize the films.