Abstract: Tungstendopedindiumoxidethinfilms(In₂O₃: W,IWO)withgoodopticalandelectricalpropertieswerepreparedonglasssubstratesbyradiofrequency(RF)reactivemagnetronsputteringmethod.Tindopedindiumoxidethinfilms(In₂O₃:  Sn,ITO)werepurchasedindustrialproduction.Allthesefilmswereirradiatedbygammarayswithdifferentamountoffluxinagroundbasedsimulationsystemclosetotheenvironmentofdeepspace.Changesincharacteristicsincludingmicrostructure,surfacemorphology,chemicalstates,opticalandelectricalpropertieswerecomparedbetweenIWOandITOfilmsafterirradiation.Thevariationsofdefectsinfilmsbeforeandafterirradiationweremeasuredbypositronannihilationtechnique(PAT).Asaresult,oxygenvacancydefectswereemergedinITOandIWOfilmsafterirradiationespeciallyinthesurfacesandinterfaces.Itisindicatedthatgammarayshaveinfluenceontransparentconductiveoxidethinfilmsbyknockingchemicalbondswithlowerbindingenergyandproducingoxygenvacancies.Recombinationbetweendifferentelementsandoxygenmaybeselectivewhilechemicalstateskeepconstant.BothITOandIWOfilmspossesssuitableanti-gammaraysirradiationproperties.AndIWOfilmsaremoreappropriateasanti-gammaraysprotectivecoatingsindeepspaceexplorationthanITOfilms.

Key words: tungsten-dopedindiumoxidethinfilms, tin-dopedindiumoxidethinfilms, gammarays, opticalandelectricalproperties, positronannihilationtechnique